JPH0316287Y2 - - Google Patents
Info
- Publication number
- JPH0316287Y2 JPH0316287Y2 JP17376485U JP17376485U JPH0316287Y2 JP H0316287 Y2 JPH0316287 Y2 JP H0316287Y2 JP 17376485 U JP17376485 U JP 17376485U JP 17376485 U JP17376485 U JP 17376485U JP H0316287 Y2 JPH0316287 Y2 JP H0316287Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafers
- wafer
- carrier
- nozzle
- gas pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 claims description 80
- 238000001514 detection method Methods 0.000 claims description 15
- 230000003287 optical effect Effects 0.000 description 6
- 239000007788 liquid Substances 0.000 description 4
- 238000005406 washing Methods 0.000 description 4
- 238000005530 etching Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17376485U JPH0316287Y2 (en]) | 1985-11-12 | 1985-11-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17376485U JPH0316287Y2 (en]) | 1985-11-12 | 1985-11-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6282738U JPS6282738U (en]) | 1987-05-27 |
| JPH0316287Y2 true JPH0316287Y2 (en]) | 1991-04-08 |
Family
ID=31111529
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17376485U Expired JPH0316287Y2 (en]) | 1985-11-12 | 1985-11-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0316287Y2 (en]) |
-
1985
- 1985-11-12 JP JP17376485U patent/JPH0316287Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6282738U (en]) | 1987-05-27 |
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